摘要
逆流检漏仪用扩散泵属于特殊用途的扩散泵。它要求扩散泵对空气的压缩比大，对氦气的最大压缩比小。为满足这样的要求，设计了 Ｋ—６５Ｆ风冷金属油扩散泵。本文介绍了 Ｋ—６５Ｆ的特殊结构，论述了采用这种结构的理论依据。并运用真空物理中的理论，气体动力学理论和Ｊａｅｃｋｅｌ理论，对Ｋ—６５Ｆ泵作了性能分析，说明设计的合理性，证明这种结构的扩散泵能够满足逆流检漏仪的特殊要求。
The diffusion pump in use for backflow leak apparatus is the particular use. It is demanded that compression ratio of diffusion pump is big for air and small for helium. In order to satisfy these requirements, metal oil diffusion pump K-65F cooled by air has designed. Particular constitution of diffusion pump K-65F is introduced and theory of the constitution is described in this paper. Performance K-65F pump will be analyzed on the basis of theory in vacuum physics, aerodynamics theory and Jaeckel theory. The design is rational. It is proved that diffusion pump of this construction can satisfy the particular requirements for backflow leak apparatus.
出处
《真空》
CAS
北大核心
1991年第4期32-35,61,共5页
Vacuum
