立方氮化硼薄膜合成方法

Techniques for Deposition of C-BN Thin Films

本文概述了最近十年来国外合成立方氨化硼薄膜的各种方法，指出了各种沉积技术的特点，并给出了试验条件、影响因素及合成立方氮化硼薄膜的红外吸收波谱．

This paper surveys the various techniques depositing C-BN thin films over the last decade. The experimental conditions, influence elements and infrared absorption spectroscopy of C-BN thin films are given in these depositing processes.