摘要
本文较为详细地分析了EatonNV10 - 80大束流离子注入机离子源电路工作原理 ,包括ARC电压、灯丝电流、气源压力调节及固体源坩埚温度控制的电路工作原理 ,同时 ,又针对常见离子源故障解决作了剖析。由于EatonNV10 - 80大束流离子注入机国内半导体厂家使用较为广泛 ,其它型号的离子注入机也可借鉴 ,本文有较高的实际指导意义。
The operation principle of the ion source circuits in the Eaton NV10-80 high current implanter is described in detail, including ARC voltage, filament current, gas pressure regulation and vaporizer temperature control. At same time, some troubleshooting measures are described for the failures that often happen on the ion source. Since the Eaton NV10-80 high current implanters are widely used in many semiconductor manufacturers in our country, this paper is also instructive and of reference to other implanter models.
出处
《微电子技术》
2002年第4期29-33,共5页
Microelectronic Technology
