纳米磁性颗粒膜的制备及微波电磁特性研究

Preparation of magnetic nano-granular films and investigation of its microwave electromagnetic property

用磁控溅射法制备了FeCoSiB纳米磁性颗粒膜 ,使用微波矢量网络分析仪 ,用波导法在C波段测量了溅射膜的微波复数磁导率、复介电常数的频散特性 ,分析了纳米磁性颗粒膜微波频率下高导磁率的机理。实验结果表明 ,纳米磁性颗粒膜除在民用的超薄、超轻信息设备中作为新一代微磁器件的重要材料外 ,还将有可能成为一种全新、大跨度的抗电磁干扰及雷达波吸波材料。

FeCoSiB magnetic nano-granular films were prepared by RF magnetron reactive sputtering method. Complex permeability μ· and complex permittivity ε· of the films were measured by Agilent 8722ES microwave network analyzer in c band. The mechanism of high permeability of the magnetic nano-granular films at microwave frequency were analysed. The experimental results show that the magnetic nano-granular films not only can be applied to micro-magnetic devices of novel information equipments, but also can be applied as wide-band anti-electromagnetic interference and radar wave absorption materials.