Ti合金化DLC膜的结构和力学性能

Structure and Mechanical Properties of Ti Alloyed DLC Films

在一台-1型双激发源等离子弧薄膜沉积装置上制取Ti合金化DLC膜,用纳米硬度计、显微硬度计、原子力显微镜以及X射线衍射仪和光电子能谱仪等手段对薄膜的力学性能和结构进行了分析和测定.摩擦磨损试验在一台球-盘滑动磨损试验机上进行.比较了不同钛合金化程度的DLC膜及热处理前后的性能变化.结果表明,薄膜的力学性能与Ti含量有非单值关系,但摩擦系数随Ti含量增加而升高;热处理后薄膜显微硬度显著升高的原因是生成了碳化钛硬化相.

Ti alloyed DLC films were prepared with a Y B H 14 Pi A -1 deposition device by dual-excitation energy source. The mechanical properties and structures of the films were measured and analyzed by Nanoindenter, Microhardness Tester, Atomic Force Microscope, as well as X-ray diffraction and X-ray Photoelectron Spectroscope. Tribological tests were carried out on a ball-disk friction and wear tester. The performance change of DLC films with different Ti alloying was investigated in view of heat treatment. The results show that the mechanical properties of the films are not monotonous with Ti contents, and the friction coefficient increases with Ti content; the obvious microhardness increase results from the formation of hardened TiC phase.