高压晶闸管台面造型技术的仿真研究

Study on the Bevel Edge Termination of Hight-voltage Thyristor

本文利用SilvacoTCAD器件仿真软件对高压晶闸管典型斜角PN结终端——正／负斜角造成的电场分布进行了仿真分析，得出：正斜角表面电场强度都小于体内电场强度，小正角造成表面耗尽层宽度增加过多，表面漏电过大，提倡喷砂形成大正角。负斜角对制造高压晶闸管有决定作用，采用展宽比的概念，降低短基区前沿浓度，即提高展宽比是制造高压晶闸管的技术关键。

In this paper,a typically PN terminal simulated by the Silvaco TCAD device simulation structure of thyristor - positive / negative bevel ternfinal is software,and its electric field distribution are analyzed.The result is the positive beveled surface electric field strength is less than the body of the electric field strength.Small positive angle give rise to surface depletion layer width increase too much and surface leakage current is too large, so it is very well advised to use the big positive angle which formed by sand blast.Negative bevel has a decisive role on mawffacturing high voltage thyristor.Using the concept of stretching ratio to reduce short base frontier concentration, so improving stretching ratio is the key to the manufacturing high voltage thyristor technology