多晶硅铸锭炉隔热屏的优化及数值模拟

Optimization and Numerical Simulation of the Shield of Polycrystalline Silicon Ingot Furnace

为了降低多晶硅铸锭生产过程中的能耗损失,提高铸锭炉热场使用寿命,对某450型多晶硅铸锭炉热场隔热屏结构进行优化,设计了金属钼屏和非金属石墨碳毡复合隔热屏。通过有限元ANSYS软件对隔热屏优化前后铸锭炉模型铸锭过程分别进行数值模拟计算,分析铸锭过程中隔热屏温度分布,发现优化后铸锭炉中隔热屏厚度方向温度梯度增大,隔热屏外侧温度降低。将数值计算结果应用于实际生产中,缩短了铸锭生产周期,有利于降低能耗,提高生产效率。

The heat shield structure of a 450 type polycrystalline silicon ingot furnace was optimized,and the composite structure of the molybdenum shield and graphite carbon shield was designed to reduce the energy loss in the polycrystalline silicon production and lengthen the lifetime of the thermal field for the high ingot furnace. Numerical simulations for the model before and after the optimization of the shield were conducted respectively by the finite element software ANSY to analyze the temperature distribution of the shield in the ingot process. It is found that the temperature gradient in the thickness direction of the optimized graphite carbon shield enlarges and the outer temperature of the graphite carbon shield decreases. Applying the numerical simulation result to the actual production can shorten the production cycle,which is useful for reducing the energy consumption and improving the production efficiency.