基于正交试验和综合评判的液体静压导轨平台多输出优化

Multi-output Optimization on Hydrostatic Guideway Platform Based on Orthogonal Design and Comprehensive Evaluation

运用正交试验设计与多输出综合评判相结合的方法,对超精密液体静压导轨平台整体结构进行优化设计。通过有限元软件模拟正交实验,结合模糊数学中的综合评判法对分析的结果进行综合评分。通过对综合评分进行极差分析,确定了影响导轨平台变形的关键因素和非关键因素,建立导轨平台机构的优化设计数学模型。根据优化结果提出全新的更为合理的液体静压导轨平台设计方案。该设计不仅有助于减小导轨的变形、提高平台导轨面间的平行度精度,还在减小整体质量方面取得了很好的效果。

The overall structure of the ultra-precision hydrostatic guideway platform was designed with optimization by using the multi-output comprehensive evaluation method and the orthogonal experimental design. Finite Element Analysis （FEA）software was used to the orthogonal experiments and the comprehensive evaluation method was used in integration to evaluate the results in fuzzy math. By extreme difference analysis of comprehensive evaluation,the key and the non-critical factors affecting the deformation of the guideway were confirmed,therefore an optimization math model was developed for the structure design of the guideway platform. Ac-cording to the optimization results,a novel and more rational design scheme was presented for the hydrostatic guideway platform. This design not only contributes to reducing the guideways deformations and improving the parallelism precision of the guideway,but also helps to reduce the mass of the whole platform with very good effects.