原子力显微镜在材料器件工艺中的应用

Applications of atomic force microscopy(AFM) in the material and device processing

介绍了原子力显微镜在碲镉汞材料器件工艺测试方面的应用。应用其可以进行磨抛后材料表面的粗糙度测试,接触孔形貌,以及外延后衬底的表面形貌。通过合理的选择扫描参数和探针,可以直观得到样品的表面形貌,接触孔还可以得到孔的尺寸和孔底形貌。尤其在接触孔测试方面,原子力的精度更高,抗干扰能力强且扫描结果更为直观,准确。本文通过对碲镉汞材料器件工艺中不同类型样品测试的介绍,认为原子力显微镜在碲镉汞材料器件工艺测试中发挥了较大的作用。

The applications of atomic force microscopy（AFM） in the MCT material and device processing are introduced.It can test the roughness of the polished material surface,the morphology of contact aperture and the surface morphology of epitaxial substrate.By selecting proper scanning parameters and probe,the morphology of the sample and the hole bottom topography of contact aperture can be obtained intuitively.Especially in the contact aperture testing,AFM has higher precision,stronger anti- interference ability,more intuitive and accurate results.According to the introduction of different samples,AFM plays an important role in the MCT material and device processing.