半导体器件老炼筛选试验设计

Design of Burn-in Screening Test for Semiconductors Devices

老炼筛选试验是有效剔除内含固有工艺缺陷的半导体器件,以及保证半导体器件使用可靠性的重要途径。本文阐述了半导体器件早期失效的基本概念,并给出了半导体器件早期失效率的预计方法。在此基础上提出了半导体器件老炼筛选试验设计方法,以期最大限度地保证半导体器件出厂后的使用可靠性。

Burn-in screening test can eliminate semiconductor devices containing defects rooted in the manufacturing process and is one of the most important approaches for field reliability assurance.The basic conception of initial failure is introduced and the methods for estimating the initial failure rate are presented.Finally,the design method of burn-in screening test for semiconductor devices is proposed in order to improve the initial failure rate of semiconductor devices in the market.