DeviceNet现场总线在MOCVD设备上的应用

Application of DeviceNet Field Bus in MOCVD Equipment

以MOCVD设备为例,介绍一种基于DeviceNet现场总线标准,采用远程DeviceNet扫描仪SST-END-1-C2与流量控制器、压力控制器构成现场总线控制网络。给出了DeviceNet软件设计与控制实现。使用效果表明DeviceNet是基于CAN总线技术的一种低成本的通信链接,是一种低端网络系统,具有低成本、高效率、高可靠性的特点。

Taking MOCVD equipment for example, this paper introduced a kind of standard based on DeviceNet field bus. The field bus control network consisted of the remote DeviceNet scanner, SST-END-1-C2, flow controllers and pressure controllers. This paper gave the software design of DeviceNet and control implementation. The use effectiveness of DeviceNet shows that DeviceNet is a kind of low cost communication link based on CAN bus technology, a kind of low network system with low cost, high efficiency and high reliability characteristics.