摘要
功率器件IGBT由于其优异特性而广泛应用于电机、电焊机和功率开关等领域,是功率器件的主流产品之一。本文首先介绍了电子辐照技术在改善IGBT关断时间的应用,以及该技术在槽栅IGBT应用中出现的异常现象,并提出了改善此类异常现象的器件制造方法。
IGBT is one of the mainstream products for power device. Because of its excellent specific property it is widely applied to electric motors, welding machine and power switch, etc. This text introduces the electron irradiation technology applicable to control IGBT off time, and the abnormal phenomenon in the application to trench IGBT, and also put forward a way to improve the trench IGBT
出处
《中国集成电路》
2014年第7期58-61,共4页
China lntegrated Circuit
