摘要
介绍了微机电系统(MEMS)传感器的发展现状,分析了典型的商用MEMS传感器,针对煤矿井下传感器应用特点,重点阐述并研究了基于MEMS技术的压力、气体传感器在煤矿井下应用的技术性能优势和可行性。最后,对煤矿井下的MEMS传感器的应用趋势进行了展望。
Introduces the development of MEMS sensor and analyzes the typical commercial MEMS sensor.Based on the applying features of the sensor under the coal mine,this paper expounds the technical performance advantage and possibility of pressure and gas sensor under the coal mine,which are on the basis of MEMS technology.Finally,the application trend of MEMS sensor under the coal mine is visioned.
出处
《煤炭技术》
CAS
北大核心
2014年第7期238-240,共3页
Coal Technology
