无限变焦3D形貌仪测量条件及不确定度分析

Measuring conditions and measurement uncertainty analysis of 3D morphology measuring machine based on infinite focus

为确定影响光学3D形貌测量结果的条件及因素,该文通过分组测量实验对无限变焦3D形貌测量仪在不同测量条件下的测量结果进行定量分析,根据实验结果总结出应用该仪器进行各类测量时选择测量条件的一般性原则。同时,分别对该仪器在不同测量应用中测量结果的不确定度进行了分析。结果表明:照明条件、视场选择、扫描分辨率等条件因素对测量结果会产生较大影响,因此在实际测量时应注意选择合适的条件以减小测量误差。

In order to study the conditions and factors that will influence the measurement results, and provide a useful technical reference for the application of this kind of machine in different measuring task. A series of experiments on using infinite focus 3D morphology measuring machine has been designed. The quantitative analysis of influence of measuring conditions has been made. Also the characteristic of measurement uncertainty of the machine has been analyzed. The experimental results show that factors including lighting, imaging field, resolution have a considerable influence on measurement results, and suitable condition settings must be done before measuring to reduce measurement error.