大气压非平衡等离子体源参数对输出等离子体浓度的影响及其机理分析

Influence and Its Mechanism of the Parameters of Atmospheric Non-equilibrium Plasma Source on the Output Plasma Density

为研究各个参数对大气压非平衡等离子体源的影响，给进一步探讨其机制提供依据，在保持其他参数不变的前提下，变化大气压非平衡等离子体源的某一个参数，用DLY-3型大气离子数密度测量仪测量其输出等离子体中离子的数密度。结果表明：在击穿限度内输出的离子数密度随外加电压升高而升高；在空气体积流量不影响放电空间分布的前提下，输出的离子数密度随体积流量增加而升高：在4．7～10kHz范围内输出的离子数密度随交流电源频率增加而升高；在2种实验放电间隙中，小间隙（0．64mm）比大间隙（1．00mm）的输出离子数密度高。在各个参数可调控的条件下所做的等离子体浓度测量可定量地描述等离子体系统的状态及其相应变化，通过变换各个参数可以使大气压非平衡等离子体源输出的等离子体浓度在相当大的范围内变化，并存在极大值。

To provide a basis for further exPloration of atmospheric non-equilibrium plasma source, we investigated the effect of multiple parameters on the plasma source. In experiments, the output plasma density was measured using DLY-3 atmospheric concentration measuring instrument, and one parameter varied while the others were fixed. The results show that the output plasma density increases with the applied voltage within its breakdown limit. If the spatial distribution of discharge is not affected by the air flow, increasement in the air flow will increase the output plasma density. The density also increases with the frequency of the AC power within 4.7- 10 kHz. Between the two tested discharge gaps, the small gap （0.64 mm） has higher output plasma density than the big gap （1.00 mm）. It is concluded that, for the plasma source, its inner status and changes can be quantified by measuring the plasma density in condition that all the parameters are adjustable. The output plasma density can be regulated in a large range by the parameters of the plasma source, and it has a maximal value.