摘要
基于内外气体交换的分子流模型,采用了以τHemin为基本判据和定量确定最长候检时间的方法,提出了以内部气体质谱分析检测元器件密封性的方法及其氦气含量法和氩气含量法,给出了这种方法的判据公式、压氦或压氩压力时间和最长候检时间公式或确定方法,规定了检测判定程序。内部气体质谱分析,需要时辅以粗漏检测,能够进行具有更高灵敏度和准确性的、破坏性的密封性检测,可用于鉴定检验、周期检验和认证性检测。
Based on the molecular flow model of the gas exchange, an internal gas mass spectrometric analyzing method for sealability test of components is presented by using τHemin as the basic criterion and a quantitative determination of the maximum dwelling time, including helium content method and argon content method. Furthermore, the process of detection and judgment is given, which contains the critical formula, the pressure and time for pressing helium or argon, and the formula or method to determine the maximum dwell time. Internal gas mass spectrometry, compatible with the gross leak detection when necessary, can be used to realize a higher sensitivity and accuracy destructive detection, also it can be used in identify test, periodic test and certification test.
出处
《中国电子科学研究院学报》
2014年第3期325-330,共6页
Journal of China Academy of Electronics and Information Technology
关键词
内部气体质谱分析
氦气含量法
氩气含量法
最长候检时间
密封性检测
internal gas mass spectrometric analyzing
helium content method
argon content method
the maximum dwell time
Sealability test
