新型碳纳米管阴极电离规的研究进展

The recent development of ionization gauge with carbon nanotube cathode

碳纳米管作为理想的电子发射极被广泛应用在x射线管、真空微波管、平板显示器、电子显微镜和真空电离规等多种电子器件中。本文重点回顾了近年来碳纳米管阴极电离规的研究进展,评述了这种新型阴极电离规的优点和存在的问题,并对其发展前景作了分析和展望。

Carbon nanotubes （CNTs）as ideal electron emitters have been widely used in various electronic devices, including x-ray tube, vacuum microwave tube, flat panel display, electron microscopes, ionization gauge, etc. We give an overview of recent research on various ionization gauges with CNT cathode, and the advantages as well as the existing problems of this novel ionization gauge are also summarized. Besides, their development prospects are also discussed.