离子交换树脂制备超纯水工艺的影响因素研究

Study on the Affecting Factors of Ion Exchange Resin Preparing Ultra-pure Water Technique

介绍了电子级超纯水精制混床离子交换树脂的特点，以出水电导率和总有机碳为考察指标，研究了进水质量、运行流量和树脂粒度均匀性等主要因素对电子级超纯水精制混床离子交换树脂出水质量的影响。研究结果表明，出水质量随着进水质量的提高而提高，运行流量控制在50～70BV／h时最佳，采用粒度更均匀的树脂出水质量和周期制水量更好。在一定的运行条件下，电子级超纯水精制混床离子交换树脂完全能满足电子行业对出水水质的要求。

The characteristics of polishing mixed bed ion exchange resin for electron-level ultra pure water was introduced. The influence of main factors such as quality of raw water, flow and resin size uniformity to the quality of product water were studied based on conductivity and TOC. As a result, the quality of product water improved while the raw water improving, the optimal flow was 50-70BV/h. And the resin size was more uniform, the product water was better. The polishing mixed bed ion exchange resin for electron-level ultra pure water could meet the requirements of electronics industry under some conditions.