高灵敏度三维力矩传感器设计与标定

Design and calibration of high sensitivity 3D torque sensor

为测量三维力矩并解决维间耦合问题,设计了一种测量微小力矩的电阻应变式传感器。分析了传感器电阻应变计组桥方案抑制维间力矩耦合的原理。通过有限元方法仿真计算出节点应变,实现传感器高灵敏度的目标。通过传感器静态标定实验得到了标定解耦矩阵,解决了由于加工误差和应变计粘贴误差带来的力矩耦合问题。实验表明:此传感器具有好的静态性能,线性度都控制在1%之内,迟滞误差也控制在0.12%以下。

To measure 3D torque and solve problem of coupling between two dimensional,a resistive strain sensor for small torque measuring is designed. The mechanism which curbs the dimension coupling is analyzed by the scheme of bridges of the sensor resistance strain gauge. Nodes strain is calculated by finite element method to achieve the goal of high sensitivity. Through static calibration experiment of sensor, calibration deeoupling matrix is obtained and the problem of torque coupling due to processing error and strain gauge paste error is solved. Experimental results show that the sensor has good static performance, and linearity is controlled within 1% and hysteresis error is below 0.12 %.