摘要
采用MEMS集成加热器设计一个温控系统。所用的加热器效率达到7.35 mm2K/mW,且功耗低。加热器面积为6 mm×6 mm,具有较高的系统集成度。该温控系统采用Fuzzy-PID温度控制算法,温度稳态误差小于0.1°C,并且约10秒即达到稳态,响应速度快。使用该系统对MEMS压力计进行环境温控,可明显抑制器件的温度漂移。
The authors present a temperature control system based on a MEMS heater. The MEMS heater has the advantages of high heating efficiency （7.35 mm2 K/mW） and low power consumption. Besides, it has a high degree of system integration （6 mm× 6 mm）. Fuzzy-PID control method that takes fuzzy adjustment to the PID parameters is used. The temperature control system achieves a high control accuracy of less than 0.1℃ and a quick response time of about 10 s. With a MEMS pressure sensor, this system greatly suppresses the temperature drift.
出处
《北京大学学报（自然科学版）》
EI
CAS
CSCD
北大核心
2014年第4期623-626,共4页
Acta Scientiarum Naturalium Universitatis Pekinensis
