脉冲偏压占空比对复合离子镀TiCN涂层结构和性能的影响

Effects of Duty-ratio of Pulsed Bias on the Structure and Properties of TiCN Coatings by Hybrid Ion Plating

采用多弧离子镀和磁控溅射复合离子镀技术在高速钢基底上制备TiCN涂层,通过改变脉冲偏压占空比的大小获得了不同的涂层试样,利用台阶仪、X射线衍射仪(XRD)、扫描电子显微镜(SEM)、维氏硬度计等对涂层进行表征,研究占空比对TiCN涂层组织结构和力学性能的影响。结果表明:随着脉冲偏压占空比的增加,TiCN涂层的表面大颗粒逐渐减少,表面形貌得到改善。涂层结构中,(111)晶面的择优取向趋势明显,沉积速率和显微硬度均出现先增大后减小的趋势,且在占空比为40%时均达最大值。TiCN涂层的最高硬度为3 800HV0.025,约为基底硬度的4倍。

TiCN coatings were deposited on the high-speed steel substrate by hybrid ion plating, which consisted of arc ion plating and magnetron sputtering ion plating. Different film samples were obtained at various duty-ratio of the pulsed bias. The profiler, X-ray diffraction （XRD）, scanning electron microscope （SEM）, and Vickerts hardness tester were employed to characterize the samples. The effects of duty-ratio of the pulsed bias on the structure and properties of the TiCN coatings were investigated. The results show that the surface morphologies of the TiCN coatings are improved since the quantity of the macroparticles is reduced. Both the deposition rate and micro-hardness of the coatings vary with the duty-ratio, and the maximum values are achieved at duty-ratio of 40%. The maximum micro-hardness of the TiCN coatings fabricated by this method can reach 3 800 HV0. 025, which is 4 times higher than that of the high-speed steel.