摘要
Spatial distributions of plasma parameters such as electron density, electron temperature and electric potential were investigated using a commercial simulation software （COMSOLTM） to predict the effects of antenna configuration in a large area inductively cou- pled plasma （ICP） system for flat panel displays. Nine planar antenna sets were evenly placed above a ceramic window. While the electron density was influenced by both the input current and gas pressure, the electron temperature and electric potential were dominantly affected by the gas pressure.
Spatial distributions of plasma parameters such as electron density, electron temperature and electric potential were investigated using a commercial simulation software （COMSOLTM） to predict the effects of antenna configuration in a large area inductively cou- pled plasma （ICP） system for flat panel displays. Nine planar antenna sets were evenly placed above a ceramic window. While the electron density was influenced by both the input current and gas pressure, the electron temperature and electric potential were dominantly affected by the gas pressure.
基金
supported in part by the International Collaborative R&D Program (N0000678)
the Industrial Strategic Technology Development Program (10041681) funded by the Ministry of Trade, Industry and Energy of Korea
