AOI技术在LTCC制程中的应用研究

Study on auto optical inspect(AOI) technology applied in the low temperature co-fired ceramic(LTCC) manufacturing process

简述了自动光学检测(AOI)技术在低温共烧陶瓷(LTCC)基板研制中的应用原理,研究了影响检测性能的关键技术,实现了在LTCC生产线上通孔、印刷、检测等工艺参数的优化,为批量生产T/R(传输/接收)组件打下了良好的基础。

Simply described the application principle of the automatic optical inspection （AOI） in the manufacturing of the low temperature co-fired ceramic （LTCC） substrate. It also studied the key technology of affecting the inspection performance. The process parameters of via-filled , printing, inspecting and so on are realized and optimized in LTCC manufacturing line. That makes a good foundation in batch yielding transmitter or receiver（T/R） module.