摘要
基于快速刀具伺服(Fast Tool Servo,FTS)的金刚石车削加工技术是一种非常有发展前景的光学自由曲面加工手段。以柔性铰链和音圈电机为主要元素,研制一套大行程快速刀具伺服系统,该系统具有刚度大、工作稳定性好、阻尼可调等优点。详细介绍了柔性铰链的设计与分析、FTS系统性能测试和自由曲面切削试验,新型FTS系统的跟踪误差为0.12%,运动分辨率优于0.04μm,可以获得Ra30nm的光学自由曲面。测试和加工结果表明,新型的FTS系统可以用光学自由曲面高效、高精密金刚石车削加工。
（Fast Tool Servo, FTS ）assisted diamond turning is most popular technique for optical freeform surfaces diamond turning. A novel long stroke FTS is developed which is mainly made up of voice coil motor and flexure hinge. The long stroke UPS has the advantage of high stiffness, high working stability and adjustable clamping. The design and analysis of the new flexure hinge, performance tests of the new FTS system and cutting experiments is thoroughly introduced here. The foUowing error is 0.12% of the full stroke. The motion revolution is about 0.04μm. The surfaces roughness of the nmchined freeform surface is Ra30nm. The tests and cutting experiments shows that the novel long stroke FTS can be used for the fabrication of optical freeform surfaces with high precision and high frequency.
出处
《机械设计与制造》
北大核心
2014年第8期69-70,74,共3页
Machinery Design & Manufacture
基金
国家自然科学基金项目(51175221
51075041)
吉林省科技发展计划(20100359
20130522155JH)
