纳米钛酸钡薄膜的制备及介电性能

Preparation and dielectric properties of nano-sized barium titanate films

以纳米钛酸钡粉体为原料,采用电泳沉积法制备得到较薄的钛酸钡薄膜。研究了电压、沉积时间和悬浮液浓度对钛酸钡薄膜成膜效果的影响,确定了钛酸钡薄膜的最佳成膜工艺条件:乙酰丙酮-乙醇的混合溶液质量浓度为75 g/L,直流电压为50 V,电泳5 min。采用反复电泳沉积和反复烧结的方法可以有效避免薄膜烧结过程中裂纹的产生。实验还发现钛酸钡薄膜的介点常数具有与钛酸钡陶瓷类似的温度特性。

Thin BaTiO3 films were prepared by electrophoretic deposition method with nano-sized BaTiO3 powder as raw material.The influences of voltage,deposition time,and suspension concentration on the BaTiO3 film forming effect were investigated,and the optimum film forming conditions were confirmed as follows： the mass concentration of mixed solution of acetyacetone and ethanol was 75 g/L,DC voltage was 50 V,and electrophoresis time was 5 min.Research found the repeated electrophoretic deposing sintering method could effectively avoid crack films.Experimental results also found that the dielectric constant of the prepared BaTiO3 thin films showed the similar temperature properties with the BaTiO3 ceramics.