摘要
采用光纤点光源的光学干涉实验与检测系统,需要的光学元件最少,具有最好的环境与机械稳定性,并以最简单的方法获得高精度的基准球面波,可最大限度地减少非平面检测的系统误差。为此,全面分析了影响光纤点光源品质的诸多因素,应用光纤光波传输的基本理论,提出了提高光纤点光源性能的简易方法,并采用数字全息的方法,对两个光纤点光源产生的球面波的干涉图进行计算分析,实现了对光纤点光源球面波的评价。结果表明,由光纤点光源所产生的球面波可以满足一般干涉检测对基准球面波精度的要求。
The optic interference experiment and testing inspection systems with fiber dot light sources need the fewest optical components, have the best environmental and mechanical stability, and can get high- precision benchmark spherical wave so that there are the minimum errors for the system. For this purpose, the factors that influence the quality of optical fiber dot light source are analyzed. Applying the basic theory of light transmission in fiber, the method to improve the performance of fiber dot light source has been found. By the way of digital holography, the interference patterns of spherical wave produced by two fiber dot light sources are analyzed and computed, and the precision of the spherical wave is evaluated. The results show that the spherical wave produced by fiber dot light sources can meet the requirement of general interference inspection system on precision of benchmark spherical wave.
出处
《激光与光电子学进展》
CSCD
北大核心
2014年第8期94-99,共6页
Laser & Optoelectronics Progress
基金
陕西省自然科学基金(2010JM8012)
关键词
测量
光学检测
光纤点光源
光纤耦合器
基准球面波
波面误差
measurement
optical inspection
fiber dot light source
fiber coupler
benchmark spherical wave
wave front error