螺旋波等离子体发射光谱研究

Study of Helicon Plasma By Emission Optical Spectrum

为了解螺旋波等离子体的光学行为及特性,对螺旋波等离子体氩气放电进行了发射光谱(OES)测量,结果显示:谱线强度在模式转换时出现大幅增加。研究了不同气压下谱线强度随功率的变化关系,并采用发射光谱强度比值法对电子激发温度进行了计算,结果表明:在螺旋波放电阶段对应的电子激发温度随着功率增加呈下降趋势。

This paper aims to evaluate the characters of argon helicon plasma by optical emission spectroscopy technique. The results show that the optical intensities increase sharply under certain conditions which correspond to the discharge mode transition. The electron excitation temperatures in helicon discharge are calculated by the ratio of two spectral lines. With increasing the input power, the electron excitation temperatures decrease.