基于PCS的纳米颗粒粒度测量系统设计

Development of Nano-Particle Measurement System Based on Photon Correlation Spectroscopy

引入不同孔径的光纤传输激光和散射光子,不同孔径的Y形光纤传输入射光和散射光,采用光子相关光谱法（PCS）设计了纳米颗粒测量系统.讨论了光纤芯径、显微物镜的数值孔径、温度和散射角度对测量结果的影响.实验结果表明,温度在13～22℃超净间中,该系统能准确地测量纳米颗粒粒度.

Different aperture fiber were applied for transmission of laser and scattered photons, different aperture y-type fiber were used for transmission of incident and scattered light synchronously. Based on photon correlation spectroscopy the nanometer particle measuring system was designed. Besides, the af- fects of fiber core diameter, microscope objectives numerical aperture, temperature and scattering angle were discussed. Experiments show that it is accurate and stable for nano-particle size distribution meas- urement, all experiments were finished in super clean room,in which temperature was controlled at about 13-22 ℃.