影响氯化氢含水量的主要因素及其控制措施

Main factors influencing water content of hydrogen chloride and preventive measures

通过采用单因素变量法对氯化氢合成系统进行调试,找出影响氯化氢含水量的主要因素,主要包括:原料氯气含水量、合成炉运行负荷、合成炉石墨内筒渗水量、冷凝器冷媒温度。提出控制氯化氢中水含量的相应措施,使之达到进三氯氢硅合成系统的要求。

A hydrogen chloride synthesis system was debugged by means of single factor variable method to find out the main factors affecting water content of hydrogen chloride. The main factors included water content of raw material chlorine, running load of synthesis furnace, seepy water amount of inner graphite canister of the synthesis furnace, and temperature of condenser refrigerant. Preventive measures were proposed to reach the requirements of trichlorosilane synthesis system on water content of hydrogen chloride.