超精密研抛机床转摆机构的优化

Optimization of Rotary-swing Mechanism of Ultra-precise Polishing Machine

为了实现复杂光学曲面的研抛加工,自行研制了一台转摆联动的五轴超精密研抛机床,并对其关键组成机构——转摆联动装置进行了优化设计。利用ANSYS Workbench软件对摆台的静力学特性进行了分析;同时以滑块位姿变化过程中摆台变形最小为优化目标,对摆台做了结构优化。基于动力学分析方法对气浮转台进行合理简化,利用ABAQUS对转台的转动部分模态分析。结果表明:优化后的机构在满足承重情况下的最大变形量明显减小,能够满足精密研抛加工的要求。

In order to polishing the complex optical surfaces,a five-axis ultra-precise polishing machine with joint movement of rotary-swing was developed individually.The rotary-swing mechanism with joint movement as its key component was optimized in de-sign.By using ANSYS Workbench software,the statics characteristic of the precise swing stage was analyzed;at the same time,the structure of the swing sets was optimized with a target of the minimum distortion during the process of change position-posture of the sli-der.Based on kinetic analysis method,air bearing rotary stage was simplified reasonably,and modal analysis of the rotating part of turntable was performed by using ABAQUS.The results show that under this circumstance of meeting the bearing load,the optimized institution significantly reduces the amount of maximum deformation,which meets the requirements of precision polishing process.