不同氧流量条件下ZnO纳米棒阵列的形成及机理分析

Formation and Mechanism Analysis of ZnO Nanorod Arrays Fabricated at Different Oxygen Flow Rates

采用脉冲激光沉积结合化学气相沉积方法在p-Si(111)衬底上制备了呈直立生长的ZnO纳米棒阵列,并且研究了氧流量对ZnO纳米棒尺寸、结晶特性等性质的影响。研究结果表明,在没有氧气的环境下无法生长ZnO纳米棒;随氧流量减小,不同晶面上ZnO生长速率的不同导致ZnO纳米棒长度减小、直径变粗、结晶质量变差、纳米棒面密度减小。氧流量的减小使得ZnO纳米棒中的氧空位缺陷含量增加,导致位于约520nm处的绿光峰增强。

ZnO nanorod arrays perpendicular to the substrates＇ surface were fabricated on p-type single crystal silicon substrates by pulsed laser deposition （PLD） and chemical vapor deposition （CVD） methods. The effects of dif- ferent oxygen flow rates on the size, crystalline property, and so on of ZnO nanorods have been studied and following results have been obtained. ZnO nanorod canr t grow with no oxygen gas participating. With the decrease of oxygen flow rate, the difference of ZnO growth rate on different ZnO crystal face leads to that the length of ZnO nanorod be- comes shorter, the diameter of ZnO nanorod becomes thicker, the crystalline property of ZnO nanorod becomes poor and the surface density of ZnO nanorod decreases. The decrease of oxygen flow rate leads to the increase of Vo content in ZnO nanorod, and consequently results in the enhancement of green light band at about 520 nm.