大行程纳米级两级驱动三维精密位移系统的设计

Design of Big Trip Nanoscale Two-stage Drive 3D Precision Displacement System

采用粗精两级驱动的方式设计了大行程纳米级三维精密位移系统。位移系统的粗驱动通过采用PID自适应控制器控制伺服电机加精密丝杠拖动一维工作台来完成,位移系统的精驱动通过层叠型的压电陶瓷位移器(PZT)来完成。采用程序控制法实现μm级和nm级两级驱动的匹配。设计了基于迈克尔逊干涉原理的可溯源的计量系统,两级驱动的定位检测都由该计量系统来检测,减小了累积误差,并运用实验验证了位移系统的有效性。

A large travel nanoscale three-dimensional precision displacement system was designed by the two-stage of coarse and fine driving pattern. The coarse driven of displacement system was completed by PID adaptive controller that controls the servo motor and precise ball screw driving a dimension table,and the fine driven of displacement system was finished by a cascade type piezoelectric microdisplacement actuator（ PZT）. Program control method was adopted to realize two level drivers matching of micrometer and nanometer lever. A traceable measuring system based on the principle of Michelson Interference was designed and used to detect the two-stage driven positioning,which reduced the accumulated detection error. And the experiments verify the effectiveness of the displacement of the system.