新型气体传感器微热板的设计与优化

Design and Optimization of New Micro-hotplate for Gas Sensor

设计了一种新型气体传感器的微热板结构,利用铂作为电极材料,SiO2作为隔热层和绝缘层。通过有限元分析工具分析了基底中各材料厚度不同时微热板的温度分布,并对测量电极的结构进行了优化。当微热板的基底中前SiO2层、中间Si层、后SiO2层的厚度分别为50μm、150μm、100μm且测量电极不放叉指时,微热板中心温度最高且能够获得最佳温度分布。这种新型的微热板结构有助于提高传感器的整体性能。

A novel micro-hotplate was designed for gas sensor. It took metal platinum as the electrode material,SiO2 as the thermal and electricity insulation layer. The temperature distributions were analyzed for different thickness of SiO2 and Si,by using finite element analysis tool,and the measuring electrode structure was optimized. When the thickness of front SiO2,Si and rear SiO2 are 50 μm,150 μm,100 μm respectively,and the measuring electrode is without interdigitated structure,the micro-hotplate can obtain the highest temperature and the best temperature distribution. The new micro-hotplate structure is beneficial to the improvement of the whole sensor performance.