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新型通用式激光扫描封头检测仪 被引量:6

New universal laser scanning head detector
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摘要 为了克服封头在传统检测中存在样板测量尺寸单一、人工读数精度低、制板耗费资源等缺点,采用激光测距2维轮廓连续扫描方法,设计了一种适用于检测不同尺寸封头形状偏差的非接触式激光检测装置,介绍了激光扫描封头仪的工作原理、扫描方式、系统组成以及各系统具体设计方法,并对内径为800mm的封头进行了实验验证。结果表明,此激光扫描封头检测仪的理想精度可达1mm^2mm,可实现高精度、高效率、自动化检测。 In order to overcome the disadvantages of the traditional head detection, such as limited size of measuring models, low accuracy of artificial reading and resource cost of plate making, a non-contact laser detection device, suitable for shape deviation detection of the head in different sizes, was designed with laser scanning 2-D contour continuously. Work principle, scan mode, system components and specific design of each subsystem of the laser scanning head device were introduced. A head with inner diameter of 800ram was verified in experiment. The results show that the laser scanning head device can make the detection automatically with high-precision, high-efficiency. The ideal accuracy can reach 1 mm - 2mm.
出处 《激光技术》 CAS CSCD 北大核心 2014年第5期651-654,共4页 Laser Technology
关键词 激光技术 形状偏差 封头 检测 laser technique shape deviation head detection
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