SnO2厚膜与基板附着强度及气敏性能研究

Research on adhesive strength and gas-sensing properties of SnO_2 thick film

通过溶胶-凝胶法制备了SnO2纳米粉末,用丝网印刷法制备了以氧化铝陶瓷为基板的SnO2厚膜。分别采用SEM、XRD及电化学工作站表征了SnO2的结构与形貌并测试了其气敏性能。结果表明,所制备的SnO2平均颗粒粒径约为60 nm,为四方相结构。与SnO2直接附着在氧化铝基板的厚膜(样品A)相比,以玻璃粉作为SnO2和氧化铝基板粘结剂的厚膜(样品B)附着强度更高,解决了SnO2与氧化铝基板附着强度差的问题;以玻璃粉为粘结剂制备的厚膜对H2具有稳定的气敏性能。

SnO2 was prepared by sol-gel method. The thick film of SnO2 was prepared on alumina substrates by screen printing method. The composition, morphology and electrochemical property of the material were characterized by XRD, SEM and electrochemical workstation respectively. The results show that the average size of SnO2 is about 60 nm with a tetragonal structure. The thick film fabricated with glass powder has a better adhesive strength than that without glass powder, which solves the problem of poor adhesive strength between SnO2 and alumina substrates. This thick film exhibites a stable H2-sensing property.