摘要
从电子元器件气密性封装的原理入手,介绍了常用的检漏试验方法,阐述了美军标MIL-STD-883氦质谱检漏试验方法的最新发展,分析了积累氦质谱试验方法的特点及要求,并探讨了基于氦气交换时间常数τHe的氦质谱检漏思路。
Based on the principle of hermetic packages of electronic components, the commonleak test methods are introduced. The recent development in the helium mass spectrometer leak testing method in MIL-STD-883 is analyzed. After that, the characteristics and requirements of the cumulative helium-mass test method are analyzed. And finally, the idea of the helium-mass detection based on the helium exchanging time constant（τHe） is discussed.
出处
《电子产品可靠性与环境试验》
2014年第4期34-38,共5页
Electronic Product Reliability and Environmental Testing
关键词
氦质谱
密封
标准
试验方法
helium-mass spectrum
seal
standard
test method
