银镜反应制备纳米蛾眼减反结构法

Fabrication of Moth-eye Antireflection Nanostructure Through a Silver Mirror Reaction

为了降低光学表面的菲涅耳反射,提出了一种制备仿生减反结构的方法.利用银镜反应并结合退火处理在硬性材质基底表面制备银纳米粒子,经反应离子刻蚀工艺,在基底表面形成一层纳米蛾眼减反结构.分析了周期分布和随机分布纳米蛾眼的光学特性,实验研究了退火参量和刻蚀参量对银纳米颗粒直径、密度以及高度的影响,并在硅和石英基底上分别制备了随机减反结构.测试结果表明:硅基平均反射率小于4.5%,双面石英基透过率达98.1%.理论和实验均表明:随机分布的纳米仿生蛾眼结构具有宽光谱、广视角和高减反特性,所提出的制备方法具有简便易行、低成本、大幅面等优点,在光电器件中具有良好的潜在应用前景.

In order to reduce the Fresnel reflection of optical surface, a method to fabricate bionic antireflective structure was proposed. Originally, silver nanoparticles were deposited on the surface of the rigid substrate based on silver mirror reaction and annealing process, and then following etching process, the moth-eye nanostructures with antireflective property were formed on the substrate. Optical characteristics of moth-eye nanostructure for random distribution and period distribution were analyzed theoretically. The results indicate that the random distributed nanostructures have a broad reflective spectrum in the visible region. In experiments, the impacts of annealing parameters and etching parameters on diameter, density and height of nanostructures were analyzed, and antireflective structures were fabricated in silicon and quartz substrate respectively. The results show that less than 4.5% in reflectance is obtained for nanostructures in silicon substrate, and the transmission is enhanced to 98.1 ~/6o for nanostructures in dual-side quartz substrate. In both theory and experiment, it indicates that random distributed bionic moth-eye structure has a high effect antireflective performance for a broad spectrum and wide angle. The proposed method has advantages of simple, low-lost and large-area fabrication of antireflective structures, and is promising for aoolication on photoelectric device.