垂直喷淋式MOCVD反应器中射流影响的研究

Numerical study on jet effect in the vertical showerhead MOCVD reactor

针对垂直喷淋式MOCVD反应器的射流现象进行数值模拟研究.通过改变反应腔高度、喷口间距、喷口速度、托盘转速等,对反应器内的流场、温度场、浓度场随上述参数的变化进行详细探讨,进一步探索MOCVD反应器中射流影响的规律.通过模拟发现:(1)在喷口下方的反应腔空间,射流速度、温度和浓度均存在周期性波动,此波动由衬底中心到衬底边缘逐渐衰减;(2)衬底中心处的垂直射流速度大于周边的速度,中心浓度高于边缘浓度,中心温度低于边缘温度;(3)增加反应腔高度,减小喷口间距,减小喷口速度、增加衬底转速,均有利于衬底上方轴向速度和反应前体浓度沿径向分布的平缓.

Numerical simulations are conducted about jet effects in the vertical showerhead MOCVD reactor. By varying the reactor height, nozzle spacing, jet speed and susceptor rotating speed, the flow, temperature and concentration fields in the reactor are simulated, so as to gain insights into the jet effect in vertical MOCVD reactor. It is concluded that（1） in the reactor chamber below the showerhead, velocity, temperature and concentration are all in periodic fluctuation, and the fluctuations decay gradually from the susceptor center to the edge;（2） the vertical velocity at the susceptor center is larger than that in the edge, the precursor concentration in the center is higher than that in the edge, and the temperature in the center is lower than that in the edge;（3） increasing the reactor height and the susceptor rotating speed, decreasing the nozzle spacing and the jet outlet velocity, the radial fluctuations of both axial jet velocity and precursor concentration will be depressed.