摘要
介绍了半导体制冷精密露点仪的基本工作原理、整机系统以及区别于其它露点仪的特点。通过采用红外线光路系统及独特的半导体热端压缩机冷却装置,实现了半导体深度制冷。经湿度标准器比对,得出此仪器具有良好的精确度及再现性。
The paper introduces the basic principle of semiconductor refrigeration precision dew point meter, the whole sys- tem and the characteristics of the different from other grain. By using infrared light path system and unique semiconductor hot end compressor cooling device, we achieve the depth of the semiconductor refrigeration. The standard humidity comparison, it is concluded that the instrument has good precision and reproducibility.
出处
《低温与特气》
CAS
2014年第4期52-54,共3页
Low Temperature and Specialty Gases
关键词
露点仪
半导体制冷
压缩机
dew point instrument
semiconductor refrigeration
compressors