摘要
为了提高轴向叶片旋涡结构的真空抽气性能,用计算流体力学(CFD)方法对轴向叶片旋涡结构在连续流态下的真空抽气特性进行模拟,研究了转速、温度、入口质量流量、出口压强、叶片与定子间隙等参数对轴向叶片旋涡结构抽气性能的影响。研究结果表明:压缩比随转速增大而增大,随温度、入口质量流量、间隙增大而减小,受出口压强影响较小;多级轴向叶片旋涡结构与高真空抽气结构串联,可以获得高真空。
The pumping characteristics of the axial blade vertex structure under continuous gas flow condition was approximated, physically modeled,and numerically simulated in computational fluid dynamics( CFD)method with software packages, ANSYS, ICEM and CFD. The influence of the major factors, including the rotating speed, temperature, inlet mass flow, outlet pressure, and clearance between blades and stator, on the pumping performance was evaluated. The simu- lated results show that weakly affected by the outlet pressure,the compression ratio increases with an increase of the rotation speed, but decreases with the increases of the temperature, inlet mass flow, and blade-rotator clearance. We suggest that the multi-stage axial blade vertex structure, connected in series, may be capable of producing high vacuum.
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2014年第8期802-807,共6页
Chinese Journal of Vacuum Science and Technology
基金
安徽省自然基金项目(090414160)
关键词
旋涡结构
真空抽气
数值模拟
连续流态
压缩比
Vertex structure, Vacuum pumping, Numerical simulation, Continuous flow, Compression ratio