超亲水性TiO_2复合薄膜的制备及特性研究

Research and Preparation of Super-hydrophilic TiO_2 Composite Thin Films

采用直流式反应磁控溅射法制备Ta/N双掺TiO2薄膜,射频式磁控溅射法制备SiO2预镀层。掺杂薄膜均在室温下制备,在空气中进行退火处理,并对掺杂薄膜的表面形貌、吸光特性以及亲水性能进行表征,得到了一种在可见光范围内具有超亲水性的TiO2复合薄膜。

In this investigation we prepared Ta/N co-doped TiO2 by DC reactive magnetron sputtering, SiO2-coated layer was prepared by radio-frequency magnetron sputtering. Doped films were prepared in room temperature and annealed in air, characterized by the AFM, UV-Vis, and hydrophilic measurements. We get a kind of TiO2 composite thin films within visible light that has the super-hydrophilic property.