高加速度宏微运动平台研究

Research on High Acceleration Motion Stage of Macro-Micro Driving

对高加速度宏微运动平台进行了研究,在分析宏微复合驱动技术的基础上,采用一种新型的宏微驱动方式,研制了基于压电陶瓷的高加速度宏微运动平台。宏运动由音圈电机驱动,可实现高加速度、大行程运动;微运动由安装在音圈电机轴上的压电陶瓷驱动,用以补偿宏动所产生的定位误差,达到高精度的设计目标。在微动过程中,由绝对式直线光栅尺实现闭环位置反馈。根据设计要求,搭建了宏微驱动高加速度高精度定位平台,通过实验验证其性能。实验结果表明,该宏微运动平台加速度大于10g,重复定位精度小于1μm。

High acceleration motion stage of macro-micro driving is researched. On the basis of analyzing the macro-micro driving technology, a novel macro-micro driving method is adopted and the high acceleration and high precision motion stage of macro-micro driving based on piezoelectric actuator is developed. The macro motion is driven by voice coil motor to achieve the motion with high acceleration and long stroke. While the micro motion is driven by piezoelectric actuator mounted on the shaft of the voice coil motor, which is used for compensating the positioning error caused by the macro motion to achieve high precision. During the period of micro motion, absolute grating scale is utilized to realize the closed-loop position feedback. Based on the design requirements, the macro-micro stage is built. In addation, the performance experiments are carried out. The results show that the stage can achieve the acceleration greater than lOg and a positioning accuracy of repeatability less than μm.