摘要
本文以半导体晶圆制造业总工程师的口吻,提问B&R(贝加莱)工业自动化技术平台,解读复杂制造业的异构自动化系统融合与跨专业装备的系统集成问题。
This paper interprets the problems about the integration of heterogeneous automation system on complex manufacturing and the integration of multidisciplinary equipment system by asking the B＆R industrial automation technology platform as a tone of the chief engineer of semiconductor wafer manufacturing.
关键词
晶圆
异构
装备
专家
Wafer
Heterogeneous
Equipment
Specialist
