HF酸处理对石英玻璃355nm激光损伤影响研究

Study on influence of HF acid treatment on 355 nm laser damage of quartz glass

利用HF酸处理提高石英玻璃355nm激光诱导损伤阈值,通过优化HF溶液浓度以及石英玻璃表面的酸处理时间,石英玻璃的透过率和损伤阈值均有所提高,均随HF酸浓度以及酸处理时间的增加呈现先增加后下降变化。实验结果表明质量分数10%的HF浓度刻蚀60 min后石英玻璃的激光损伤阈值为15.17 J/cm2,相比酸处理前提高了167.5%。对比分析了相同激光能量密度作用下有无HF酸处理石英玻璃表面损伤面积变化,最后给出了HF酸处理提高石英玻璃的激光诱导损伤阈值机制。

In this paper,355nm laser induced damage threshold of the quartz glass was improved by HF acid treat-ment,optical transmissivity and damage threshold of quartz glass were improved by optimizing the HF concentration and acid etched time,which show that optical transmissivity and damage threshold were increased then decreased with the increase of the HF concentration and acid etched time.The experimental results show that the laser induced dam-age threshold of quartz glass at the experiment conditions of the 10% HF concentration and etched time 60 minutes is 15.17 J/cm2 and improves 167.5% compared to damage threshold before the acid treatment.The surface damage area change of quartz glass induced by the same 355nm laser energy density with/without HF acid etching was compara-tively analyzed.Finally,the improvement mechanisms of 355nm laser induced damage threshold of quartz glass after the HF acid treatment are given.