低频长脉宽高压脉冲电源设计

Design of a low-frequency long-pulse high-voltage power supply

本文针对离子注入工艺的特定要求,采用buck拓扑结构,以IGBT为斩波器件,并结合单片机与CPLD技术,研制了一种低频长脉宽的高压脉冲数字电源。通过离子注入试验并结合工艺研究验证了该电源的实用性和稳定性。

Aiming at the specific requirements of voltage in ion implantation technology, a low-frequency long-pulse high-voltage digital power supply is developed.In this power supply, an IGBT is used as chopper, Buck topological structure is constructed. And in the controlling system, the technology of the single-chip microcomputer is combined with CPLD. As a conclusion, the practicability and stability of the power supply have already been verified by the experiment consisted of ion implantation and industrial research.