摘要
介绍了新型工程型高温度梯度单晶炉研制开发的项目背景,主要研发内容及技术指标,创新性和达到的技术水平,产品采标,应用领域及应用情况,产品经济和社会效益情况,对推动产业发展或行业技术进步的意义。
In this work. the research backgroud of novel engineering type high temperature gradient single crystal furnace was introduced. The main research content, key technical indicators, innovativeness and state of the art were investigated. The information was also provided in standard adoption, application fields and status, econonmic and social benefits, as well as the significance in industry development and technology improvement.
出处
《真空》
CAS
2014年第5期59-63,共5页
Vacuum
关键词
工程型高温度梯度单晶炉
高温度梯度两区加热
计算机程序
PLC控制
engineering type high temperature gradient single crystal furnaee, high temperature gradient doublearea heating
computer program
PLC control