激光诱导荧光法检测低气压NO分子

Detection of Low-Pressure NO Based on Laser Induced Fluorescence

以Nd:YAG固体激光器泵浦LPX 200染料激光器(dye laser),用激光诱导荧光的方法(LIF)探测低气压NO等离子体中NO分子在基态到共振激发态(A^2∑+-X^2Π)的荧光激发光谱;运用较大体积的、较高真空的分子束自由基成像系统IRIS,利用探测器件ICCD相机进行拍照得到荧光图片和光谱分辨的图像。在激光输出波长为226.2 nm时对受NO射频放电等离子体的功率和气压变化影响以及混合气体N_2/O_2/C_2H_4配比NO影响的荧光强度进行定量测量。

Fluorescence excitation spectrum of NO（A^2∑＋-X^2Π） in low-pressure NO plasma is mainly detected by using the methods of laser induced fluorescence and pumping LPX 200 dye laser by Nd： YAG laser. Then the NO plasma molecules from ground state to excitation state is detected. Through the imaging system of IRIS （instrument of radicals interacting with surface） of larger volume and higher-vacuum, the fluorescence picture and the image of spectrum resolution are detected by ICCD （ intensified charge coupled device） camera. Fluorescence intensity is measured which is influenced by RF discharge plasma power, variation of gas pressure and mixed gases（N2/O2/C2H4） at the wavelength of 226.2 nm.