石英微机械陀螺敏感器件减振设计

Vibration Reduction Design of Sensing Device of Quartz Micromachined Gyroscope

石英微机械陀螺敏感器件在多轴陀螺应用中,各敏感器件之间存在振动干扰,导致陀螺噪声过大,输出信号中存在低频信号,无法满足使用要求。应用减振技术设计了一款集成式的减振器,该减振器具有体积小、质量轻等特点。利用有限元法模拟计算减振器减振效率及固有频率,该减振器在敏感器件激励频率范围内减振效率大于96%;减振器转动振动模态固有频率大于陀螺带宽(150Hz)的两倍以上;减振器低阶线性振动模态固有频率大于敏感器件检测频率与激励频率之差(340Hz)的两倍以上。

For multi-axis applications of quartz micromachined gyroscopes,there exists the vibration interference among the sensing devices,which results in larger noise of gyroscope and low-frequency signals in the output sig- nals, thus can not satisfy the application requirements. An integrated vibration absorber is designed by using the vi- bration absorbing technique. The proposed absorber has the features of small size, low mass etc. The absorber effi- ciency and nature frequency are simulated and calculated by FEM method. The results show that the vibration-reduc- tion efficiency of the absorber in the range of excited frequency is larger than 96~ ,the nature frequency of vibration mode of the absorber rotation is two times larger than the bandwidth of gyroscope（150 Hz） ,and the nature frequen- cy of the low-order linear vibration mode is two times larger than the frequency difference（340 Hz） between the measuring frequency and the exciting frequency of the sensing device.