基于压电陶瓷促动器的连续镜面变形镜研制进展

Progress of the Continuous Surface Deformable Mirror Based on Piezo-Ceramic Actuator

为了开展自适应光学技术研究，研制了一系列的基于压电陶瓷促动器的连续镜面变形镜，促动器控制单元数分别为21、97、137和961。利用变形镜作为自适应光学波前校正器，进行了多个室内、室外的自适应光学校正实验，取得了很好的实验效果，其中137单元变形镜在1．23m望远镜上面的自适应光学系统中取得了对O．2”双星的校正效果，在700～900nm波段接近望远镜的衍射极限。介绍了变形镜的基本结构，各变形镜的主要参数测试及关键性能指标，列举了各变形镜在自适应光学系统中的应用情况。最后对变形镜的研制进展及应用进行了展望。

In order to carry out the research of adaptive optics （AO）, we develop a series of continuous surface deformable mirrors （DM） based on piezo- ceramic actuator, and the controllable number of the actuators of each DM is 21, 97, 137 and 961, respectively. Many in- and out-door AO correction experiments are carried out, in which the DM is used as the wavefront corrector of the AO system, and the experiments reach the expectation. With the 137-element AO system for the 1.23-m telescope, the close-loop correction of the 0.2＂ binary star is attained, which approaches the diffraction limit of the 1.23-m telescope at 700-900 nm band. The basic structures of the DM, the testing of each main parameters and key performance of each DM are presented. The applications of each DM in the AO system are also showed. The development and application progress of the DM are presented.