一种用于EI离子源的低功耗灯丝及其控制技术的研究

Researdch on a Low Power Consumption Filament and its Control used in EI Ion Source

主要介绍了一种用于EI离子源的低功耗灯丝及其控制技术，包括灯丝制作工艺、测试方案和控制技术三个方面。介绍的灯丝在EI离子源中工作时，可以在低功耗环境下，发射出相应数量的电子，同时通过负反馈控制，使发射电子流达到很高的稳定度，这样既提高了灯丝发射电子的效率，也提高了离子源离子化效率，又提高了离子源的稳定性，进而提高了质谱仪的稳定性。

A kind of filament used in EI ion source with low consumption and its control technologies is introduces, including filament production process, test and control technology in three aspects. Filament in EI ion source introduced in this paper, can work with a low power consumption, emits a corresponding number of electrons, and at the same time, by feedback control, can make the emission electron flow achieve a high degree of stability,it can not only improve the efficiency of the emission electron from filament, which improve the efficiency of ion source ionization, and improve the stability of ion source, which improves the stability of the mass spectrometer.